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ClosedPublished 10 Aug 2026

Onto Innovation Inc. /
Rigaku Holdings Corporation

Onto Innovation Inc. completes purchase of Rigaku Holdings Corporation

Buy side: Onto Innovation Inc.
Buy sideOnto Innovation Inc.
Onto Innovation Inc. · 10 Aug 2026Source
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Follow Onto Innovation Inc. Follow Rigaku Holdings Corporation
Buy side: Onto Innovation Inc.
Buy sideOnto Innovation Inc.
01 / BuyerOnto Innovation Inc.
02 / TargetRigaku Holdings Corporation
Source for the buyer and target: Onto Innovation Inc.

For the buyer and target.

“On August 10, 2026 (Tokyo time), Onto Innovation Inc. (the “Company”) completed the previously announced acquisition of 61,123,436 shares (27% of the issued and outstanding shares) of the common stock of Rigaku Holdings Corporation (“Rigaku”), pursuant to the Share Purchase Agreement (the “Purchase Agreement”), dated as of April 21, 2026, by and between the Company and Atom Investment, L.P. (the “Seller”), an affiliate of The Carlyle Group.”

Published 10 Aug 2026

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01

What happened

Onto Innovation Inc. completed its acquisition of Rigaku Holdings Corporation for approximately $720 million, according to a filing dated Aug. 10, 2026. [01]

02

The source

Everything on this page comes from the source below, quoted word for word.

01
Source · Onto Innovation Inc.

Onto Innovation Inc. completes purchase of Rigaku Holdings Corporation

This document is the source for the companies, stage, figure and people on this page.

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03

Timeline

Every date the source states, in order, each with the words it comes from. Anything marked ahead is a target the source gives, not something that has happened.

  1. Announced

    “Onto Innovation Inc. completes purchase of Rigaku Holdings Corporation Onto Innovation Inc. completed its acquisition of Rigaku Holdings Corporation for approximately $720 million, according to a filing dated Aug. 10,…”

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  2. Published by Onto Innovation Inc.

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Deal Web

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This dealOnto Innovation Inc. / Rigaku Holdings CorporationClosed · Published 10 Aug 2026
BuyerOnto Innovation Inc.TargetRigaku Holdings Corporation
This dealOnto Innovation Inc. / Rigaku Holdings Corporation

Closed · Onto Innovation Inc. acquired Rigaku Holdings Corporation (Closed, published 10 Aug 2026).

Announced 10 Aug 2026
Timeline
  1. Announced
  2. Published by Onto Innovation Inc.
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